
Oil Diffusion Vacuum Pump
High-speed oil diffusion pump for ultra-high vacuum in coating, furnaces, metallurgy and space-simulation systems.
- Pumping Speed
- 1,800 – 12,000 L/s
- Ultimate Vacuum
- 5×10⁻⁵ Pa
- Heater Power
- 1.4 – 8 kW
- Inlet
- 160 – 500 mm
Highlights
- Genuine equipment supplied with warranty
- Professional installation & commissioning
- 24/7 after-sales support nationwide
- Genuine spare parts stocked locally
The EOD oil diffusion pump uses a low-pressure, high-speed directional oil-vapour jet to pump gas, and when backed by a suitable fore pump it reaches ultra-high vacuum. Rapid heating gives energy-efficient start-up and a wide flow-rate range covers many system sizes. It is a mainstay for vacuum coating and furnaces, electronics, aerospace, metallurgy, materials processing and space simulation. Pumping speeds span 1,800 to 12,000 L/s.
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