Dry Scroll Vacuum Pump (16 – 60 m³/h)

This higher-capacity EDS dry scroll range extends the oil-free, water-free scroll platform to larger clean-vacuum duties, from 4.4 up to 16.6 L/s. Like the smaller models it uses a symmetrical scroll cavity with small clearances for a stable pumping speed and low leakage, and it removes condensable gases without contaminating the chamber — ideal for semiconductor, pharmaceutical, coating and laboratory use where any oil or water contamination is unacceptable.