IN
Dry Scroll Vacuum Pump
Vacuum PumpsEDS Series

Dry Scroll Vacuum Pump

Completely oil-free and water-free scroll vacuum pump for clean applications such as labs, semiconductors and medical equipment.

Pumping Speed
0.8 – 12.5 L/s (3 – 45 m³/h)
Ultimate Vacuum
0.8 Pa
Type
Oil-free dry scroll
Inlet Flange
KF16 – KF40

Highlights

  • Genuine equipment supplied with warranty
  • Professional installation & commissioning
  • 24/7 after-sales support nationwide
  • Genuine spare parts stocked locally

The EDS dry scroll vacuum pump generates vacuum with a pair of scrolls and no lubricating oil or sealing water in the pumping chamber, so the pumped gas stays completely clean. Its symmetrical working cavity gives low vibration, low noise and high reliability with few moving parts, and it maintains a stable pumping speed across a wide pressure range. Because it can handle condensable gases without contaminating the chamber, it suits medical, electronics, semiconductor, pharmaceutical, solar, laboratory and leak-detection duties. This range covers 0.8 to 12.5 L/s.