Turbo / Hybrid Molecular Pump
High-speed turbo and hybrid molecular pumps for ultra-high vacuum in coating, semiconductor and analytical instruments.
- Pumping Speed
- 600 – 4,000 L/s
- Ultimate Vacuum
- down to 8×10⁻⁸ Pa
- Compression Ratio
- >10⁸–10⁹ (N₂)
- Type
- Turbo / hybrid molecular
Highlights
- Genuine equipment supplied with warranty
- Professional installation & commissioning
- 24/7 after-sales support nationwide
- Genuine spare parts stocked locally
The EMP turbo and hybrid molecular pumps deliver clean ultra-high vacuum with a high compression ratio (over 10⁸–10⁹ for nitrogen) and no memory effect on the pumped gas. A lightweight, high-strength vane rotor gives stability, a long service life and low mechanical wear, with start-up in well under 20 minutes. They are widely used in laboratory and analytical instruments, laser systems, vacuum coating and sputtering, semiconductor manufacturing and vacuum degassing. Pumping speeds run from 600 to 4,000 L/s.
You May Also Need
Related Products
Dry Scroll Vacuum Pump
Completely oil-free and water-free scroll vacuum pump for clean applications such as labs, semiconductors and medical equipment.
View details
Dry Scroll Vacuum Pump (16 – 60 m³/h)
Higher-capacity oil-free scroll vacuum pump for clean industrial and laboratory vacuum from 4.4 to 16.6 L/s.
View details
Dry Screw Vacuum Pump
Oil-free dry screw vacuum pump that handles condensable vapours and solids without residue for chemical and process duty.
View details
Boxed Dry Screw Vacuum Pump
Enclosed, mobile-framed dry screw vacuum pump with side-panel connections and optional PLC/WiFi monitoring.
View details