IN
Grease-Lubricated Hybrid Molecular Pump
Vacuum PumpsEMP Series

Grease-Lubricated Hybrid Molecular Pump

Oil-free hybrid molecular pump on grease-lubricated ceramic bearings, delivering ultra-high vacuum without a cold trap.

Pumping Speed
80 – 2,000 L/s
Ultimate Vacuum
down to 8×10⁻⁸ Pa
Rotor Speed
24,000 – 60,000 rpm
Bearings
Grease-lubricated ceramic

Highlights

  • Genuine equipment supplied with warranty
  • Professional installation & commissioning
  • 24/7 after-sales support nationwide
  • Genuine spare parts stocked locally

The EMP grease-lubricated hybrid molecular pump reaches clean ultra-high vacuum without any cold trap or oil baffle, running on grease-lubricated ceramic bearings for oil-free operation with performance comparable to a turbomolecular pump. Vibration is held at or below 0.1 µm, start-up takes only a few minutes, and air- or water-cooling and flexible mounting positions make it easy to integrate. It suits photovoltaic, lighting, aerospace, semiconductor, laser and materials applications. Pumping speeds span 80 to 2,000 L/s.