Maglev Turbomolecular Pump

The CXF series suspends its rotor on magnetic bearings, eliminating all mechanical contact inside the pump. The result is oil-free, ultra-clean vacuum with no abrasion in the pump chamber, very low vibration and noise, and essentially maintenance-free operation. Rotation speed is adjustable for variable capacity, installation is position-independent, and the pump tolerates high inlet pressure — making it well suited to semiconductor manufacturing, glass and solar-cell coating, electron microscopy, metallurgy and plasma technology. Pumping speeds range from 1,400 to 3,000 L/s.